Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
NORM herausgegeben am 24.7.2003
Bezeichnung normen: ISO 20341:2003
Ausgabedatum normen: 24.7.2003
Zahl der Seiten: 5
Gewicht ca.: 15 g (0.03 Pfund)
Land: Internationale technische Norm
Kategorie: Technische Normen ISO
Description / Abstract: ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.