Vacuum technology — Mass-spectrometer-type leak-detector calibration
NORM herausgegeben am 1.9.1979
Bezeichnung normen: ISO 3530:1979
Ausgabedatum normen: 1.9.1979
Zahl der Seiten: 10
Gewicht ca.: 30 g (0.07 Pfund)
Land: Internationale technische Norm
Kategorie: Technische Normen ISO
Description / Abstract: Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.