Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials (Endorsed by AENOR in December of 2011.)
NORM herausgegeben am 1.12.2011
Designation standards: UNE-EN 62047-10:2011
Publication date standards: 1.12.2011
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: Spanish technical standard
Kategorie: Technische Normen UNE