Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials (Endorsed by AENOR in November of 2014.)
NORM herausgegeben am 1.11.2014
Designation standards: UNE-EN 62047-21:2014
Publication date standards: 1.11.2014
The number of pages: 17
Approximate weight : 51 g (0.11 lbs)
Country: Spanish technical standard
Kategorie: Technische Normen UNE