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Standard Test Method for Measuring Flatness, Thickness, and Thickness Variation on Silicon Wafers by Automated Noncontact Scanning
Automatische name übersetzung:
Standard Test Method for Measuring Ebenheit , Dicke und Stärke Variation auf Silizium-Wafern durch automatisierte berührungslose Scannen
NORM herausgegeben am 1.1.1994
Bezeichnung normen: ASTM F1530-94
Anmerkung: UNGÜLTIG
Ausgabedatum normen: 1.1.1994
SKU: NS-50645
Zahl der Seiten: 7
Gewicht ca.: 21 g (0.05 Pfund)
Land: Amerikanische technische Norm
Kategorie: Technische Normen ASTM
Keywords:
Flatness-semiconductors, Noncontact technique, Nondestructive evaluation (NDE)-semiconductors, Probe methods, Silicon semiconductors-slices/wafers, Silicon semiconductors-slices/wafers, Thickness-semiconductors, Thickness variation, Wafers, silicon wafers-flatness/thickness/thickness variation, by automated, noncontact scanning, test, ICS Number Code 29.045 (Semiconducting materials)
1. Scope |
1.1 This test method covers a noncontacting, non-destructive procedure to determine the thickness and flatness of clean, dry, semiconductor wafers in such a way that no physical reference is required. 1.2 This test method is applicable to wafers 50 mm or larger in diameter, and 100 [mu]m (0.004 in.) approximately and larger in thickness, independent of thickness variation and surface finish, and of wafer shape. 1.3 This test method measures the flatness of the front wafer surface as it would appear relative to a specified reference plane when the back surface of the water is ideally flat, as when pulled down onto an ideally clean, flat chuck. It does not measure the free-form shape of the wafer. 1.4 Because no chuck is used as a measurement reference, this test method is relatively insensitive to microscopic particles on the back surface of the wafer. 1.5 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only. 1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
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